Solexir has engineered a series of Edge Bead Removal products by utilizing mixture of high purity solvents. These products feature varying strength, viscosity and evaporation rates that are compatible with all cleaning equipment. By controlling the substrate spins speed, the dispense nozzle’s position, pressure and direction the edge bead will be completely removed when Solexir EBR products is used.
The Solexir 520EBR series are mixture of organic solvents which provides more selectivity and cleaning efficiency during EBR process. Solexir 520EBR series operate in a temperature range of 25 to 30-degree C during cleaning EBR process.
Solexir 520EBR series quite effectively clean photoresist residues in the front and the back sections of wafer edges. Solexir 520EBR series can be used with any nozzle jet head.
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- None toxic
- Water Soluble
- Room temperature operation
- Fast particle and residue cleaner
- Optimized for density and viscosity