Solexir-CA7100 solution is a basic inorganic solution with a pH around 12. It is very well water rinseable. Particles will be removed by this solution through zeta potential force and neutralization process without any side reaction between cleaning solution and cassette.
Removing electrostatic contaminated particles from cassettes or wafers disks holders.
1- Spray or expose warm Solexir-CA7100 cleaning solution on cassettes for 1 to 2 minutes
2- Rinse cassette with warm Di-Water, using spray tool
3- Dry and package the cassette in a particle free environment.